介绍

Advanced Packaging

Focusing on advanced packaging processes including 2.5D/3D integration, Wafer Level Packaging (WLP) and Fan-out packaging, we supply core equipment such as fully automatic high-vacuum wafer bonders, fully automatic photoresist coaters and fully automatic 8-chamber high-pressure cleaning machines, empowering customers to achieve mass production with high-density interconnection, superior reliability and lower costs.

Typical Use Cases

  • Temporary Bonding & Debonding
    Temporary Bonding & Debonding

    Temporary Bonding & Debonding

  • Direct & Indirect Permanent Bonding
    Direct & Indirect Permanent Bonding

    Direct & Indirect Permanent Bonding

  • Hybrid Bonding
    Hybrid Bonding

    Hybrid Bonding

  • Advanced Packaging LAB-LDI
    Advanced Packaging LAB-LDI

    Advanced Packaging LAB-LDI

  • Mid-Process Cleaning & Metrology-Inspection
    Mid-Process Cleaning & Metrology-Inspection

    Mid-Process Cleaning & Metrology-Inspection