Three Core Industry Tracks, Critical Process Equipment Solutions

Precision Wafer Processing

Core Equipment for Bonding, Debonding & Inspection

Precision Wafer Processing

Core Equipment for Bonding, Debonding & Inspection

Precision Wafer Processing

Core Equipment for Bonding, Debonding & Inspection

Automatic Permanent Bonding System
This system is applied to wafer-level packaging for microsystems such as radio..
Automatic Temporary Bonding System With Adhesive Coating
The automatic Cassette-to-Cassette operation reduces manual intervention and...
Automatic Laser Debonding and Cleaning Integrated System
This system is suitable for the manufacturing processes of integrated circuits..
Automatic High Pressure Cleaning System
Suitable for advanced packaging, wafer fabrication, ICs, power electronics...
Automatic Temporary Bonding System
This system is primarily used in the semiconductor power device industry...
Automatic Debonding System
This system is primarily used in the semiconductor power device industry...
Automatic Glass Cleaning and Coating System
This system is primarily used in the field of semiconductor power devices...
Automatic Edge Bread Removal and Cleaning System
This system is primarily used in the semiconductor power device industry. It inv
全自动负压清洗机
主要用于集成电路、先进封装等领域,采用负压配合湿法清洗工艺去除狭小空间内的助焊剂,具有清洗效率高、适用大尺寸芯片小凸点间隙等优点。
全自动涂胶机
全自动涂胶机可以对晶圆进行涂胶和显影,适用工艺有 G-line、I-line 等。该机台主要由传输模块、工艺模块、加热和冷却模块、供液模块、电气控制模块等组成,
全自动涂胶显影机
1.热板采用渐进式烘烤; 2.设备占地小,产能/WPH高,工艺腔体自由搭配; 3.采用电动胶泵,胶路、显影液管路可进行水浴恒温; 4.可应对5mm翘曲晶圆
全自动UV解键合机
主要用于集成电路,先进封装等领域,晶圆完成制程后剥离。解离过程简单,玻璃载片可回收再利用。
全自动临时UV膜键合机
主要用于集成电路,先进封装等领域,为待减薄晶圆提供机械支撑。具有工序简单,键合温度相对低的优点,可大幅缩短键合工序所需时间。
全自动晶圆气泡检测机
主要应用于先进封装键合工序后的气泡(空洞)数量、大小等的检测,相对于超声波检测具有检测精度高、检测效率快、无需纯水介质、节约成本等优势。
压氦氟油检漏仪
应用于半导体器件、集成电路、电子产品等电子元器件进行细检和粗检的自动化检漏装置。设备采用双罐结构,双罐都可以同时兼容压氢和压氟油作业,使用灵活高效。
车规芯片压氦测漏仪
车规级芯片的气密封装检测、功率模块(如IGBT、SiC)的密封性验证、MEMS传感器封装泄漏测试、其他要求高可靠性的电子元器件检漏。
Automatic Permanent Bonding System
Automatic Temporary Bonding System With Adhesive Coating
Automatic Laser Debonding and Cleaning Integrated System
Automatic High Pressure Cleaning System
Automatic Temporary Bonding System
Automatic Debonding System
Automatic Glass Cleaning and Coating System
Automatic Edge Bread Removal and Cleaning System
全自动负压清洗机
全自动涂胶机
全自动涂胶显影机
全自动UV解键合机
全自动临时UV膜键合机
全自动晶圆气泡检测机
压氦氟油检漏仪
车规芯片压氦测漏仪