Core Equipment · Smart Future
主要特点
The automated leak detection device is applied to electronic components such as semiconductor devices, integrated circuits, and electronic products for both fine and coarse inspections. The device adopts a dual-tank structure, with both tanks capable of accommodating helium and fluorinated oil pressurization operations simultaneously, offering flexibility and efficiency in use.
规格参数
Pressure Vessel Dimensions | Φ260mm*250mm (depth) (Custom sizes available upon request) |
Ultimate Vacuum | ≤50pa |
Inflation Pressure（Max.） | 0.6Mpa |
Filtration Accuracy | 1μm (Optional) |
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